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Fluorinert™ FC-3283

Liquid temperature range (-50°C to 128°C) makes it ideal for a variety of applications such as etchers, ion implanters, and testers. Composition does not fractionate or shift with time ensuring fluid loss is kept to minimum and transport properties do not change.

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Product Overview

Fluid ideal for use in single phase heat transfer applications in semiconductor manufacturing.

Applications

Ideal for a variety of applications such as etchers, ion implanters, testers, dielectric bath, heat transfer, and semiconductor cooling

Product Specifications

• Appearance: Clear, colorless
• Average Molecular Weight: 521
• Boiling Point (1 atm): 128°C
• Pour Point: -50°C
• Vapor Pressure: 1.44 x 103 pascals
• Latent Heat of Vaporization (at normal boiling point): 78 J/g
• Liquid Density: 1820 kg/m3
• Kinematic Viscosity: 0.75 centistokes
• Absolute Viscosity: 1.4 centipoise
• Liquid Specific Heat: 1100 J kg-1 °C-1
• Liquid Thermal Conductivity : 0.066 W m-1 °C-1
• Coefficient of Expansion: 0.0014 °C-1
• Water Solubility: 7 ppmw
• Solubility in Water: <5 ppmw
• Ozone Depletion Potential: 0
• Dielectric Strength: 43 kV, 0.1" gap
• Dielectric Constant: 1.89

Related Products

3M™ Fluorinert™ Electronic Liquids

Designed for long-lasting high performance in heat transfer applications in wafer-fab equipment and for direct contact cooling with military grade electronics.

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