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Fluorinert™ FC-3283

Fluid ideal for use in single phase heat transfer applications in semiconductor manufacturing.

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Product Overview

Liquid temperature range (-50°C to 128°C) makes it ideal for a variety of applications such as etchers, ion implanters, and testers. Composition does not fractionate or shift with time ensuring fluid loss is kept to minimum and transport properties do not change.

Product Specifications

Appearance: Clear, colorless
Average Molecular Weight: 521
Boiling Point (1 atm): 128°C
Pour Point: -50°C
Vapor Pressure: 1.44 x 103 pascals
Latent Heat of Vaporization (at normal boiling point): 78 J/g
Liquid Density: 1820 kg/m3
Kinematic Viscosity: 0.75 centistokes
Absolute Viscosity: 1.4 centipoise
Liquid Specific Heat: 1100 J kg-1 °C-1
Liquid Thermal Conductivity : 0.066 W m-1 °C-1
Coefficient of Expansion: 0.0014 °C-1
Water Solubility: 7 ppmw
Solubility in Water: <5 ppmw
Ozone Depletion Potential: 0
Dielectric Strength: 43 kV, 0.1" gap
Dielectric Constant: 1.89

Primary Chemistry: PERFLUORO COMPOUNDS

Features & Benefits

Zero ozone depletion potential
Exempt from the U.S. EPA and most State definitions of a volatile organic compound (VOC), and does not contribute to ground-level smog formation
Thermal stability
Chemical stability
Wide liquid range
Non-conductive
Narrow boiling range
Compatibility

Applications

Ideal for a variety of applications such as etchers, ion implanters, testers, dielectric bath, heat transfer, and semiconductor cooling 








Related Products

3M™ Fluorinert™ Electronic Liquids

Designed for long-lasting high performance in heat transfer applications in wafer-fab equipment and for direct contact cooling with military grade electronics.

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