Non-conductive, dielectric fluid for use in single phase heat transfer in semiconductor manufacturing and complex technology applications. Liquid phase (-65°C to 128°C)
3M™ Fluorinert™ FC-3283 is a high performance dielectric thermal fluid that exhibits a useable temperature range of (-50°C to 128°C).
Fluorinert™ FC-3283 is particularly well suited for thermal transfer applications involving etchers, ion implanters and testers.
The unique composition of Fluorinert™ FC-3283 does not fractionate over time, ensuring that fluid loss is kept to a minimum and fluid performance doesn’t falter. Fluorinert™ FC-3283 provides the lowest molecular weight of the Fluorinert™ portfolio.
CAS Number: 86508-42-1
Appearance: Clear, colorless
Average Molecular Weight: 521
Boiling Point (1 atm): 128°C
Pour Point: -50°C
Vapor Pressure: 1.44 x 103 pascals
Latent Heat of Vaporization (at normal boiling point): 78 J/g
Liquid Density: 1820 kg/m3
Kinematic Viscosity: 0.75 centistokes
Absolute Viscosity: 1.4 centipoise
Liquid Specific Heat: 1100 J kg-1 °C-1
Liquid Thermal Conductivity : 0.066 W m-1 °C-1
Coefficient of Expansion: 0.0014 °C-1
Water Solubility: 7 ppmw
Solubility in Water: <5 ppmw
Ozone Depletion Potential: 0
Dielectric Strength: 43 kV, 0.1" gap
Dielectric Constant: 1.89
Primary Chemistry: PERFLUORO COMPOUNDS
Zero ozone depletion potential
Exempt from the U.S. EPA and most State definitions of a volatile organic compound (VOC), and does not contribute to ground-level smog formation
Chemical stability
Thermal Stability
Wide liquid range
Non-conductive
Non-Flammable
Narrow boiling range
Compatibility
Excellent Heat Transfer Stability
High Global Warming Potential (GWP) Solutions
Long-term Atmospheric Damage
Thermally Unstable Fluid Solutions
Electronic Liquid FC-3283 is ideal for a variety of applications such as etchers, ion implanters, testers, dielectric bath, heat transfer, and semiconductor cooling.
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